Optical Waveguides and Photodiodes in 0.18μm CMOS SOI with No Post-processing
نویسندگان
چکیده
We demonstrate the first optical waveguide and fastest photodiode implemented in a commercial CMOS technology without performing any post-processing. The measured waveguide loss at 1.55μm is 37dB/cm and bandwidth of photodiode exceeds 9.2GHz at 850nm. OCIS codes: (230.7370) Waveguides; (230.5170) Photodiodes.
منابع مشابه
Impact of Layout on the Performance of Photodiodes in 0.18μm CMOS SOI
The impact of layout on the responsivity and bandwidth of photodiodes is studied and summarized. The photodiodes are fabricated in a 0.18μm CMOS SOI process technology. The measurements are performed at wavelengths near 850nm.
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تاریخ انتشار 2013